APPARATUS FOR SWITCHING HEAD PLATE OF EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for switching a head plate of equipment for manufacturing a semiconductor is provided to easily switch a head plate, by installing a cylinder to automatically make the head plate perform a switching process. CONSTITUTION: A head plate(12) is installed on the upper surface of an open probe body, and a portion of the head plate is connected to the probe body by a hinge. A cylinder(14) moves up/down the head plate to switch the upper surface of the probe body while the head plate is revolving with reference to its axis. An air pump(16) supplies air to the cylinder to move up/down the head plate. A Solenoid(18) is installed between the cylinder and the air pump to intermit the supply of air to the cylinder.