| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid valve for quickly washing away a chemical liquid remaining in the chemical liquid valve by using a small amount of pure water. SOLUTION: This chemical liquid valve 1 is (1) provided with an output flow path space 14 formed in the vicinity of the output side of an input flow path 18, a pure water flow path 26 communicating the output flow path space 14 with an input port 27 and a pure water valve seat 28 provided in the middle of the pure water flow path 26, and all of the above components are provided on valve bodies 11 and 19, and also (2) provided with a pure water valve 29 to be brought into contact with or separated away from the pure water valve seat 28.
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