POLISHING METHOD AND POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a polishing method capable of improving the flatness of the surface to be polished of a workpiece and capable of lengthening the life of an abrasive cloth. SOLUTION: In the initial stages of polishing, internal pressure of an elastic body 2 mounted with the abrasive cloth 1 in a polishing tool 3 is set to low pressure, and the rotation of the polishing tool 3 and the rotation of a workiece holding tool 10 are set to the low speed. After that, the internal pressure is set to high pressure in polishing, and the rotation of the polishing tool 3 and the rotation of the workpiece holding tool 10 are respectively set to the high speed.