| 摘要 |
An inventive infrared bolometer includes an active matrix level having a substrate provided with an integrated circuit, a pair of connecting terminals and a protective layer, a support level having a bridge and a pair of conduction lines formed on top of the bridge, wherein the bridge includes a pair of anchor portion, a pair of leg portions and an elevated portion, an absorption level having a bolometer element surrounded by an absorber, a reflective layer located at bottom of the absorber and an IR absorber coating placed on top of the absorber, and a pair of posts placed between the absorption level and the support level, wherein a top portion of each of the posts is attached on the center portion of the absorber and a bottom portion thereof is attached on the elevated portion of the bridge. The absorption level is formed with a groove along and near its edge so as to prevent stresses accumulated in absorption level from being relieved.
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