| 摘要 |
PURPOSE: A preparation method of spherical and fine(submicron) particles used as fluorescent materials for displayer and fillers of semiconductor EMC(epoxy molding compound) is provided, which is simple and reproducible and enables mass production by thermal decomposing droplets of raw materials formed from ultrasonic sprayer of nozzle. CONSTITUTION: The preparation method of fine particles for fluorescent materials, Zn(Ga(1-x)Alx)2O4:Mn, BaMgAl10O17:Eu, (Y,Gd)BO3:Eu, comprises the steps of: preparing a precursor by dissolving nitrates, acetates, sulfates, chlorides into distilled water, isopropyl alcohol or acid; forming droplets by ultrasonic sprayer; carrying to a high temperature furnace by carrier gas(0.1-5L/min of rate) such as N2, CO2, Ar and H2; thermal-decomposing at 300-1700deg.C; drying, thermal-treating at 300-1600deg.C for 0.5-10hrs. for growing crystals and cooling. Also, the preparation method of fine SiO2 particles, fillers of semiconductor EMC, comprises the steps of: dissolving TEOS(tertaethylorthosilicate) into ethanol, HNO3 and distilled water in a molar ratio of 0.1-4 : 0.1-4 : 0.01-5 : 0.5-30; forming droplets through a nozzle under 1-3Mpa/nozzle pressure; thermal decomposing the droplets carried by the pressure at 300-1100deg.C. in a reacting furnace.
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