| 摘要 |
PURPOSE: An apparatus for cleaning parts of semiconductor equipment is provided to prevent environmental pollution of a workplace and to shorten cleaning time, by automatically spraying cleaning solvent of a solid particle type to clean an object, and by making a work table and a spray nozzle assembly controlled to be transferred horizontally, revolved and transferred vertically. CONSTITUTION: A case(3) has a cleaning chamber(1) where an object to clean is contained. The object to clean is settled on a work table(5) located on the lower surface of the cleaning chamber. A work table horizontal transfer unit horizontally transfers the worktable, disposed in the case. A worktable-revolving unit revolves the worktable, disposed in the case. A spray nozzle assembly(23) sprays solvent of a solid particle type to the object placed on the worktable, disposed in the case. A spray nozzle vertical transfer unit vertically transfers the spray nozzle assembly, disposed in the case. A control unit controls the word table horizontal transfer unit, the worktable-revolving unit and the spray nozzle vertical transfer unit, disposed in the case.
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