| 摘要 |
PROBLEM TO BE SOLVED: To improve polishing accuracy by eliminating a vibration phenomenon of a work as well as to improve follow-up rotational performance of the work. SOLUTION: The work holding device in a polishing machine is constituted by rotatably supporting a rotational member 2 for holding a work 1 on a support link 3 by a radial bearing 8 at the outer periphery of the rotational member 2, and supporting it on a line (a rotational axis of the work) passing the rotational center of the rotational member 2 by a pivot bearing 7 composed of a pivot 5 integrated with the rotational member 2 and a receiving part 6 provided on the support link 3.
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