| 摘要 |
1,255,407. Positioning semi-conductor substrates. INTERNATIONAL BUSINESS MACHINES CORP. 22 May, 1969 [27 May, 1968], No. 26155/69. Heading B8S. A semi-conductor substrate is held between jaws 43, 44 operated by a rack, and is then positioned by micrometer means 38. The jaws are carried by upper member 18, which is carried by intermediate member 16, which is carried by bottom member 14. Members 14, 16, 18 (Figs. 2, 3).-Member 14 is displaceable along key 21 relative to fixed base 11; member 16 is displaceable along key 25 relative to member 14, and member 18 is rotatable relative to member 16 around member 26 which form part of the latter. Handle 36 operates screw 32 to lock 18 to 16; handle 30 operates screw 27 to lock 16 to 14; handle 24 operates screw 22 to lock 14 to base 11, and handle 60 operates to lock the whole unit to base 11. Operation (Fig. 1).-Handle 60 is operated to free the whole unit. The handle 36 is operated to unlock member 18 and micrometer means 38 is operated to rotate the jaws carrying the substrate. Handle 36 is operated to lock the substrate in its new rotated position. Similarly, handles 30 and 24 are operated to permit the micrometer means 38 to move members 16 and 14 along their respective axes until the substrate is in its final required position in which it is locked by handle 60. |
