| 摘要 |
PURPOSE: A boat cap of a vertical diffusion furnace for manufacturing a semiconductor device is to provide a more stable structure in terms of process quality and function, by remarkably reducing the number of parts, and by improving a sealing property. CONSTITUTION: A plurality of wafers(4) are stacked in a boat(3). The boat is placed on a boat cap(50). Pluralities of fixing pins(52) are formed as one body with the boat cap, protruded on the upper surface of the boat cap to fix the boat. Spaces are vertically formed on the inner surface of a plurality of radiating plates(54), having a predetermined interval.
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