| 摘要 |
PROBLEM TO BE SOLVED: To provide a low stress interface formed between two materials having coefficients of thermal expansion different from each other. SOLUTION: This low stress interface has a laminated structure 101 including a first layer 104a made of a first material, a second layer 104b made of a material different from that used in the first layer 104a, and further having a layer 107 formed between the first and second layers and made of a third material 107, the laminated structure 101 has a substantially flat surface 121, and has a coefficient of thermal expansion (TCE) in a certain lateral direction, and a second material 106a is bonded to the laminated structure 101 to form an interface 118, and the second material 106a has a substantially flat surface 122 and has a coefficient of thermal expansion (TCE) same as that of the laminated structure 101. |
