发明名称 Feedback control for scanning tunnel microscopes
摘要 A feedback control system for enhancing the feedback loop characteristics of a vertical axis control in a scanning tunneling microscope or the like, including a tip member for positioning relative to a surface for measuring the topography of the surface. A horizontal control coupled to the tip for providing a plurality of adjacent horizontal scans across the surface. A vertical control coupled to the tip for providing a vertical control of the tip during the plurality of adjacent horizontal scans. A local error signal produced in accordance with the vertical position of the tip relative to the surface in real time during the plurality of adjacent horizontal scans. A storage member responsive to the local error signal for storing the local error signal for producing a delayed error signal representing the vertical position of the tip relative to the surface at an earlier time, and a vertical tip control signal coupled to the vertical control and formed by combining the local error signal and the delayed error signal for enhancing the control of the vertical position of the tip.
申请公布号 USRE37203(E1) 申请公布日期 2001.06.05
申请号 US19980034175 申请日期 1998.03.04
申请人 DIGITAL INSTRUMENTS, INC. 发明人 ELINGS VIRGIL B.;GURLEY JOHN A.
分类号 G01Q10/06;G01Q20/00;G01Q20/02;G01Q60/10;H01J37/26;(IPC1-7):H01J37/26 主分类号 G01Q10/06
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