Method of manufacturing mixed mode semiconductor device

摘要

A method of manufacturing the metallic electrodes of a capacitor in a mixed mode semiconductor device. The method comprises the steps of providing a substrate having a conductive layer and the lower electrode of a capacitor formed thereon, and then depositing a dielectric layer over the substrate. A first opening and a second opening are then formed in the dielectric layer. The first opening exposes a portion of the conductive layer while the second opening exposes a portion of the lower electrode. Finally, a conductive plug and the upper electrode of the capacitor are formed in the respective first and second openings that are in corresponding positions above the conductive layer and lower electrode, respectively.