发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for manufacturing a semiconductor device is provided to simultaneously embody a logic device and an analog device and to prevent a latch-up characteristic in the logic device from being reduced, by using an asymmetric well. CONSTITUTION: A plurality of isolating layers(25a) having a constant interval are formed on a semiconductor substrate(21). Nitrogen ions are implanted into the semiconductor substrate in a region where an analog device and an electrostatic discharge(ESD) protection circuit are to be formed, to form a nitrogen impurity region(27). Impurity ions are selectively implanted into the semiconductor substrate to form the first and second conductive well regions in the surface of the semiconductor substrate between the isolating layers.
申请公布号 KR20010044927(A) 申请公布日期 2001.06.05
申请号 KR19990047987 申请日期 1999.11.01
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, JU HYEONG
分类号 H01L27/04;(IPC1-7):H01L27/04 主分类号 H01L27/04
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