发明名称 Method and apparatus for testing a semiconductor device by measuring quiescent currents (IDDQ) at two different voltages
摘要 A method for detecting defects in a semiconductor device using IDDQ testing techniques that is not dependent upon the background leakage current for defect determination. One embodiment of the present invention measures a first quiescent current at a first voltage, measures a second quiescent current at a second voltage; determines a defect current component from the two measurements and evaluates the defective current against a screening value.
申请公布号 US6242934(B1) 申请公布日期 2001.06.05
申请号 US19970918675 申请日期 1997.08.21
申请人 INTEL CORPORATION 发明人 KALB, JR. JEFFREY C.
分类号 G01R31/30;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/30
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