发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device and a method for fabricating the same are provided to improve an insulating characteristic between a gate electrode and a storage node by using a groove of a gate line. CONSTITUTION: A gate oxide layer(17), a gate electrode(18), and a gate cap insulating layer(19) are laminated on a semiconductor substrate(11). A groove is formed on the semiconductor substrate(11) of both sides of the gate electrode(18). An upper edge portion of the hate electrode(18) has a curvature. A sidewall spacer(20) is formed along the both sides of the gate electrode(18). A contact area between the sidewall spacer(20) and the semiconductor substrate(11) is reduced since each upper edge portion of the gate electrode(18) and the gate cap insulating layer(19) has the curvature. Accordingly, a contact area between the semiconductor substrate(11) and a storage node formed on one side of the gate electrode(18) can be reduced.
申请公布号 KR100298429(B1) 申请公布日期 2001.05.31
申请号 KR19970054233 申请日期 1997.10.22
申请人 HYUNDAI MICRO ELECTRONICS CO., LTD. 发明人 SONG, MYEONG HO
分类号 H01L21/28;(IPC1-7):H01L21/28 主分类号 H01L21/28
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