| 摘要 |
In a size inspection method and a size inspection apparatus, even when a measurement object has a contour having sizes not to be easily measured and having a contour not to be easily determined, the contour and the sizes can be determined. A contour of the inspection or measurement object is detected, and positions detected are registered to constitute a group of registered positions. At measurement or inspection, a comparison is conducted with the group of registered positions in a measurement direction to extract correlation data within a measurement range. A position having highest correlation with the group of registered positions is set as a position on one side of a size measurement location. Resultantly, sizes are measured and a contour is inspected.
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