Vacuum measuring device, uses propagation of electrons through gas-filled measuring space and evaluation of electron currents at electron collectors

摘要

The vacuum measuring device has at least one electron source for supplying electrons to a gas-filled measuring space containing at least 2 electron collectors positioned after one another in the electron propagation direction, with calculation of the gas pressure from the ratio of their electron currents. A stabilization circuit (S) is provided for the electron current of one of the electron collectors, so that the gas pressure can be measured directly from the electron current of the other electron collector.