Röntgenstrahlen-Maske und Verfahren zu ihrer Herstellung,申请号DE19934316114-传众专利搜索

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发明名称	Röntgenstrahlen-Maske und Verfahren zu ihrer Herstellung
摘要
申请公布号	DE4316114(C2)	申请公布日期	2001.05.31
申请号	DE19934316114	申请日期	1993.05.13
申请人	MITSUBISHI DENKI K.K., TOKIO/TOKYO	发明人	YABE, HIDEKI;MARUMOTO, KENJI;YOSHIOKA, NOBUYUKI
分类号	C23C14/14;C23C14/06;C23C14/34;G03F1/08;G03F1/14;G03F7/09;H01L21/027;H01L21/285;(IPC1-7):G03F1/14;G03F7/00	主分类号	C23C14/14
代理机构		代理人
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地址

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