| 发明名称 |
CERAMIC HEATER |
| 摘要 |
The invention provides a ceramic heater superior in temperature control and oxidation resistance, which includes a resistance heater using a ceramic substrate as a heater material. The resistance heater includes one or more circuits formed on the ceramic substrate, and an insulating material thereon.
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| 申请公布号 |
WO0139552(A1) |
申请公布日期 |
2001.05.31 |
| 申请号 |
WO2000JP08226 |
申请日期 |
2000.11.22 |
| 申请人 |
IBIDEN CO., LTD.;ZHOU, YANLING |
发明人 |
ZHOU, YANLING |
| 分类号 |
H05B3/20;H01L21/027;H05B3/10;H05B3/14;H05B3/16;H05B3/26;H05B3/68;(IPC1-7):H05B3/20;H05B3/56;H01L21/324 |
主分类号 |
H05B3/20 |
| 代理机构 |
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