发明名称 Thin-film transistor array and method of fabricating the same
摘要 A thin-film transistor array includes a substrate, an electrically conductive portion, and a metal layer. The electrically conductive portion is made of one of indium tin oxide, indium oxide, and tin oxide. The electrically conductive portion and the metal layer are formed on a common surface of the substrate. The metal layer includes a first layer and a second layer. The first layer is made of one of aluminum and an aluminum alloy. The second layer extends on the first layer and is made of metal having an oxidization potential nobler than a reduction potential of said one of indium tin oxide, indium oxide, and tin oxide in alkaline aqueous solution.
申请公布号 US2001002050(A1) 申请公布日期 2001.05.31
申请号 US20010756329 申请日期 2001.01.08
申请人 发明人 KOBAYASHI IKUNORI;TAKEDA MAMORU;MINO YOSHIKO
分类号 H01L21/3205;C23C28/00;G02F1/1368;H01L21/336;H01L29/40;H01L29/45;H01L29/78;H01L29/786;(IPC1-7):H01L29/74 主分类号 H01L21/3205
代理机构 代理人
主权项
地址