| 摘要 |
The method is used for examining the condition of a large number of holes such as contact holes or through holes formed in a sample. The method involves aligning a charged particle beam onto the sample and detecting the signals given off. The method includes the steps of determining measurement areas on the sample, which contain holes. The beam is then directed onto this area. An electric current which flows between each measurement region and earth is measured. The current distribution data is then determined from the measured absorption currents and, using this data, a brightness image is displayed on a display unit.
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