发明名称 Heat absorption medium for infrared sensor formed on surface of temperature detection part is thinner in edge region than central region
摘要 The medium has a film of infrared absorption medium (2) formed on the surface of a temperature detection part (1) that is thinner in the edge region than in the center. The film thickness is inclined towards the edge region from the central region of the infrared absorption structure and its surroundings. The medium is formed by vapor deposition or sputtering using a mask (4). Independent claims are also included for the following: (1) a method of producing a heat absorption medium; (2) an infrared sensor.
申请公布号 DE10057404(A1) 申请公布日期 2001.05.31
申请号 DE20001057404 申请日期 2000.11.20
申请人 MURATA MFG. CO., LTD. 发明人 KUBO, RYUICHI;YOSHINO, YUKIO
分类号 H01L37/00;G01J1/02;G01J5/10;(IPC1-7):G01K1/16;C09D5/32 主分类号 H01L37/00
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