发明名称 Buffer system for a wafer handling system field of the invention
摘要 A buffer station for an article handling system, the handling system having a general path along which it moves when handling the article, the buffer station including at least two supporting assemblies including supporting elements forming a supporting plane each capable of supporting an article within the supporting plane and located so as to support the article within the general path, at least two receptacles for liquid in which the at least two supporting assemblies are disposed, and at least two drivers associated with the at least two supporting assemblies and the receptacles for shifting them in and out of the general path.
申请公布号 US2001001888(A1) 申请公布日期 2001.05.31
申请号 US20000725932 申请日期 2000.11.30
申请人 HAIMOVICH ELI;DVIR ERAN 发明人 HAIMOVICH ELI;DVIR ERAN
分类号 H01L21/677;(IPC1-7):H01L21/00 主分类号 H01L21/677
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