发明名称 SURFACE TREATMENT METHOD AND DEVICE THEREFOR
摘要 A surface treatment method wherein one or more active particle streams are generated and aimed at a surface to be treated so that the particle stream interacts therewith. The active particle stream consists of activated particles forming chemically active sites on the surface, and modifying particles occupying said sites. The energy of the activated particles is greater than the energy at break of the inhibited surface bonds of the surface, and lower than the radiative flaw formation energy on the surface. The strength of the particle stream at the treated surface is greater than a quantity N/t where N is the surface density of the inhibited bonds to be broken and t is the duration of exposure of any point on the treated surface to the stream. A device for carrying out the method is also provided.
申请公布号 US2001002285(A1) 申请公布日期 2001.05.31
申请号 US19980068695 申请日期 1998.05.13
申请人 KOULIK PAVEL;ZORINA EVGENIA 发明人 KOULIK PAVEL;ZORINA EVGENIA
分类号 C23C8/10;C23C8/36;C23C16/452;H01L21/3065;(IPC1-7):H05H1/00 主分类号 C23C8/10
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