| 摘要 |
A catadioptric anamorphic beam expanding telescope (2A, 2B) expands a beam in a first axis substantially perpendicular to the beam propagation axis, and deflects it in a plane substantially perpendicular to the first axis. The beam expanding telescope (2A, 2B) can include reflective, refractive, and combined reflective/refractive elements. An embodiment includes an off axis convex spheric reflector (205) and off axis combined reflective/refractive optical element, commonly known as a Mangin mirror (206), incorporating a refractive first surface and a reflective rear surface, which compensate for aberrations introduced by the off axis deflection of the beam. The telescope is particularly useful for deep ultraviolet (DUV) applications at wavelengths shorter than about 250 nm.
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