| 摘要 |
The invention relates to a technical solution for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves. According to said method a) the energy required for the formation of the plasma (4) is supplied in the form of modulated microwaves, produced by a microwave generator (15), to the hollow wave-guiding structure (1), which contains the object to be treated (2) and is closed on all sides to retain the microwaves b) the plasma (4) is ignited (3) using an ignition device (11) at a predetermined point which is spatially separate from the entry point (5) of the microwaves c) the flowing localised plasma (4) moves under its own momentum in the hollow wave-guiding structure (1) from the ignition point (3) over the surfaces to be treated in the direction of the entry point of the microwaves (5), a hollow space which is sufficient to allow the passage of plasma being provided above the surface to be treated in the treatment chamber (9) d) the plasma treatment is carried out in and above the atmospheric pressure range using an atmospheric composition supplied by a device (12), which is suitable for the plasma treatment e) the flow of plasma (4) is halted by a device (13), as soon as it has coated the surface to be treated. |
