发明名称 Spatial light modulator
摘要 A modulator formed with a solid state electro-optic material having a pixellated structure interconnected to a circuit on a semiconductor substrate. Silicon CMOS integrated circuit that can include random access memories (RAMs) are used as a substrate and interfaced to solid state electro-optic materials coated thereon. In particular, the electro-optic modulators are controlled by RAM cells to produce a modulation of reflected light. SRAMs can be used with connection to the SRAM cell flip-flop. DRAMs can be used with the modulator replacing the DRAM storage capacitor. The SLM thus formed can be connected to a digital computer and controlled as if were a being written to as a memory, but other IC structures can also be used. In order to enhance the modulation effects, the electro-optic material is used as the spacer for a Fabry-Perot etalon structure that is also deposited on the semiconductor substrate. PLZT is a suitable electro-optic material.
申请公布号 AU3262901(A) 申请公布日期 2001.05.30
申请号 AU20010032629 申请日期 2000.11.17
申请人 CORNING APPLIED TECHNOLOGIES 发明人 FEILING WANG;KEWEN KEVIN LI;DEAN TSANG
分类号 G02F1/03;G02F1/055;G02F1/21 主分类号 G02F1/03
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