发明名称 |
Substrate transport apparatus and transport teaching system |
摘要 |
To provide a substrate transport device and a transport teaching system which can automatically perform a teaching processing in order to reduce the burden of an operator and to eliminate a positional shift accurately and efficiently in a short time. Optical connectors 251, 252, 253 and 254 of a jig 200 and optical connectors 256, 257, 258 and 259 fixedly provided on a substrate transport device are opposed to each other and optical axes are coincident with each other. A lens having a high condensation ratio is provided in each optical connector. A light signal is output from optical sensor heads 231 and 241 through an optical fiber F2, each optical connector and an optical fiber F1, and a light signal input to optical sensor heads 232 and 242 is guided into the substrate transport device. Then, an arm 31b is automatically moved in a three-axis direction. Thus, an edge position of a detected portion 122 is detected to acquire positional information so that teaching information is obtained. <IMAGE> |
申请公布号 |
EP1103354(A1) |
申请公布日期 |
2001.05.30 |
申请号 |
EP20000126011 |
申请日期 |
2000.11.28 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD.;KAWASAKI JUKOGYO KABUSHIKI KAISHA |
发明人 |
KAWAMATSU, YASUO;WATANABE, YOSHIHIKO;HASHIMOTO, YASUHIKO |
分类号 |
B25J9/22;B25J13/08;B25J19/00;B25J19/02;B65G49/06;B65G49/07;H01L21/68;H01L21/687 |
主分类号 |
B25J9/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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