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发明名称
Heat transfer regulating in substrate holder assembly
摘要
申请公布号
GB2356637(A)
申请公布日期
2001.05.30
申请号
GB20000028204
申请日期
2000.11.20
申请人
VLADIMIR * GOROKHOVSKY
发明人
VLADIMIR * GOROKHOVSKY
分类号
C23C16/26;C23C16/458;C23C16/46;C30B25/10;C30B25/12;(IPC1-7):C23C16/458;C23C14/50;C23C16/44
主分类号
C23C16/26
代理机构
代理人
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地址
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