| 摘要 |
PROBLEM TO BE SOLVED: To execute highly accurately length measurement of a target sample whose dimensional measurement is required to be executed with a lowered magnification because of being separated in spite of a fine element, in consideration of such problems. SOLUTION: This scanning electron microscope for, first of all, scanning an electron beam on a sample, and for forming a sample image based on a secondary signal obtained from the sample, and for executing dimensional measurement between two points based on the sample image, in order to attain the above purpose, has such a characteristic as to be equipped with a means for elongating and forming the sample image in the vertical direction relative to a straight line connecting the two points.
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