| 发明名称 |
Method of making a density multiplier for semiconductor device manufacturing |
| 摘要 |
A method of manufacturing a semiconductor device with increased density of structures that have at least one dimension less than that provided by the lithography system being used in the manufacturing process.
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| 申请公布号 |
US6239008(B1) |
申请公布日期 |
2001.05.29 |
| 申请号 |
US19990407907 |
申请日期 |
1999.09.29 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
YU ALLEN S.;STEFFAN PAUL J.;SCHOLER THOMAS C. |
| 分类号 |
H01L21/027;H01L21/033;H01L21/308;(IPC1-7):H01L21/320 |
主分类号 |
H01L21/027 |
| 代理机构 |
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| 地址 |
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