| 摘要 |
A first coating layer structure 3a is produced by coating, alignment, exposure and development. On this coating layer structure 3a is deposited the first colour filter layer system 5a0,5a1. Over the entire colour filter layer system 5 is deposited a sacrificial layer 7. Outside the vacuum container the coating layer structure is dissolved and with it the colour filter layer system regions 5a0 are removed. A further process of coating, alignment, exposure and development is carried out to create a coating layer structure 3b. Next the second colour filter layer system 5b and the second sacrificial layer 7b are deposited. Thereby the sacrificial layer 7 withstands the step of dissolving the coating and can be removed finally without damaging the colour filter layer system regions. Accordingly, any flakes 9 remaining from the lift-off are removed with the sacrificial layer 7.
|
