PELLICLE

摘要

PROBLEM TO BE SOLVED: To prevent the crystallization of a phenol derivative contained in an organic material used in a pellicle on a mask. SOLUTION: The amount of a phenol derivative contained in an organic material exposed to the inner face of a mask structure obtained by attaching a pellicle to a photomask and having >=0.1% weight decrease by heating by a heat weight measuring method when heating is carried out at 50 deg.C for 4 hr is adjusted to 0.1-15μg.