发明名称 HIGH-ACCURACY FINE ANGLE MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To remove such a defect that many errors are generated in measurement of a fine angle on the grounds that an angle is measured by a measuring device shifted from a standard of the angle such as a rotary encoder and that only 90 degrees, 60 degrees or the like can be used as the standard of the angle, in conventional high-accuracy angle measurement. SOLUTION: A plane mirror 1 is mounted on an angle measuring object (not illustrated), and the plane mirror 1 is mounted displaceably against a standard plane 4 together with the angle measuring object about a rotation center 2. A slit or a pinhole 6 is formed on the standard plane 4, and a displacement meter 3 having a laser emitting hole formed oppositely to the slit or the pinhole 6 so that a laser enters the slit or the pinhole 6 is arranged. When the angle of the plane mirror 1 against the standard plane 4 is measured, a laser beam 7 is emitted from the displacement meter 3 into the slit or the pinhole 6, to obtain the distance between reference plane mirror 1.
申请公布号 JP2001147111(A) 申请公布日期 2001.05.29
申请号 JP19990330590 申请日期 1999.11.19
申请人 NEC CORP 发明人 HIRAMATSU MASARU
分类号 G01B11/26;(IPC1-7):G01B11/26 主分类号 G01B11/26
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