| 摘要 |
PURPOSE: A method for lowering viscosity of a demethyl aluminium hybrid used a precursor in a fabricating process of an aluminium film is provided to lower a viscosity of a demethyl aluminium hybrid and fabricate aluminium films in large quantities by adding a phosphine into a demethyl aluminium hybrid solution. CONSTITUTION: A mixed solution is formed by adding a de-ethyl phenyl phosphine of 0.88, 1.58, 2.23, and 2.67 mol percent into a liquefied demethyl aluminium hybrid. A viscosity of the mixed solution is measured under a normal temperature by using a digital viscometer. The viscosity of the mixed solution is lower than the viscosity of a demethyl aluminium hybrid solution. A mixed solution formed by adding a tribenzyl phosphine of 0.08, 0.16, 0.24, and 0.37 mol percent into the liquefied demethyl aluminium hybrid. The viscosity of the mixed solution is measured under the normal temperature by using the digital viscometer. The viscosity of the mixed solution is lower than the viscosity of the demethyl aluminium hybrid solution.
|
