SAMPLE SURFACE DEPOSIT INSPECTION SYSTEM, SAMPLE SURFACE DEPOSIT INSPECTION METHOD, SAMPLE SURFACE DEPOSIT ELIMINATION SYSTEM, SAMPLE SURFACE DEPOSIT STICKING SYSTEM AND SAMPLE SURFACE DEPOSIT DISPOSAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a sample surface deposit inspection system, a deposit elimination system and a deposit sticking system capable of easily detecting deposit even on a rugged sample surface and efficiently eliminating static electric charge to eliminate the deposit from a base. SOLUTION: An ultraviolet light source 12 irradiates ultraviolet rays from every angle including the surface and back face of a solid or liquid sample. An optical system 13 converges the ultraviolet rays directly or through a lens or the like to irradiate the sample. An optical mechanism 13 has a measuring mechanism for recording the in-plane distributed image of fluorescent intensity radiated from the sample surface after the irradiation of ultraviolet rays, by an image pickup apparatus or the like, and a magnifying mechanism for the detection of the radiated fluorescence from the local part of the sample surface through a microscope, and guides the radiated fluorescence into a spectroscope 11. A moving mechanism can move these sample stage and observation system precisely in a wide range.