发明名称 Buried heterostructure vertical-cavity surface-emitting laser diodes using impurity induced layer disordering (IILD) via a buried impurity source
摘要 The barrier layers within a quantum well active region of a vertical cavity surface emitting laser can be silicon doped. Under thermal annealing, the silicon doped barrier layers will form disordered regions of the quantum well active region around the remaining non-disordered regions of the quantum well active region. The disordered regions of the quantum well active region will prevent diffusion of injected carriers from the non-disordered, light emitting quantum well active region.
申请公布号 US6238944(B1) 申请公布日期 2001.05.29
申请号 US19990471746 申请日期 1999.12.21
申请人 XEROX CORPORATION 发明人 FLOYD PHILIP D.
分类号 H01S5/183;H01S5/20;(IPC1-7):H01L21/00 主分类号 H01S5/183
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