| 摘要 |
PROBLEM TO BE SOLVED: To provide an anti-corrosion and anti-plasma ceramic with good corrosion and plasma resistance even when the ceramic is exposed to a plasma in chlorine- or fluorine-based halogen-related gas. SOLUTION: A ceramic to be exposed to chlorine- or fluorine-based halogen- related gas and exposed to a plasma is made of yttrium-aluminum-garnet-based sintered material containing cerium of 3 to 10000 wt.ppm with relative density of 99% or above. |
