| 摘要 |
PROBLEM TO BE SOLVED: To prevent invasion of an atmosphere to an optical path of an exposure light through a tube made of a fluororesin or a fluororubber as a material, a sealing material or the like. SOLUTION: The aligner having a container 9 for closely containing an optical component existing on an optical path of an exposure light and having an inlet and an outlet of the gas to be replaced with a predetermined gas therein, and replacing means 1 to 8, 10 for replacing the gas by using the inlet and the outlet in the container, comprises means 1, 2, 4, 5a, 5b, 6a, 6b, 8 for maintaining the pressures of parts 3, 9 using a material except a metal as the material for constituting a partition wall of a space to be filled with the gas from the exterior at a higher pressure than the exterior.
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