| 摘要 |
PROBLEM TO BE SOLVED: To improve characteristic deterioration of a closed loop system encountering with when a sky hook spring is developed by using a speed sensor. SOLUTION: In the active vibration removing device for controlling a vibration removing base by a control means under the feedback control using an actuator, the control means has speed sensors VS-Z1, VS-Z2, VS-Z3, VS-X1, VS-Y2, VS-Y3 and a compensating means 17 for compensating a phase delay or a phase lead to the detected output or shaping frequency characteristics. In this case, an electric spring effect is given to the base by the feedback control based on the output of the compensating means.
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