Fluorescent X-ray analyzer with path switching device

摘要

A fluorescent X-ray analyzer has at least three optical detection paths along which the secondary fluorescent X-ray to be analyzed travels selectively and includes a monochromator (6) carried by a first spindle (14) having a longitudinal axis (O) passing in touch with a light receiving surface of the monochromator (6). A first detector (8A) for measuring the intensity of at least a portion of the secondary X-ray (7) monochromatized by the monochromator (6) while allowing the remaining portion of the secondary X-ray (7) to pass therethrough, and a light receiving slit member (11) for passing the secondary X-ray (7) monochromatized by the monochromator (6) therethrough are carried by a second spindle (17) in side-by-side relation in a circumferential direction. A third spindle (20) is utilized separate from the second spindle (17) for carrying a second detector (8B) for measuring the intensity of the secondary X-ray (7) having passed through the first detector (8A) or the light receiving slit member (11).