| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a rapid and accurate table driver by raising the natural frequency of a structure. SOLUTION: The table driver comprises a table movable by holding a board, a sub-table for supporting the table, a base for supporting the sub-table, a table drive means for driving the table to the sub-table, a sub-table drive means for driving the sub-table along the reference surface of the base, and an actuator for generating a force between the table and the base, thereby directly transmitting a force from the table to the base.</p> |
