| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of inexpensively and simply executing two-dimensional positioning. SOLUTION: A device constituted of a side plate provided with a supporting plate for holding an object to be worked or an object to be measured, a seating provided with the side plate, an XY stage, and a reference pattern, mounting the XY stage on the seating, fixing a positioning CCD camera upward on a movable arm attached to the XY stage, fixing a working or measuring head downward on the XY stage and arranging the reference pattern on the upper position of the CCD camera and the object to be worked or the object to be measured on the lower position of the working or measuring head respectively, in parallel with the XY stage is used for the purpose of acquiring the absolute position coordinates of an individual reference pattern formed in the reference pattern and positional coordinates in the visual field of the CCD camera and calculating the position of the camera from the sum of both the positional coordinates.
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