| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus which can significantly reduce the number of times of position adjustment and reduce the time for transfer for improving the working efficiency significantly, and further can reduce the dimensions thereof. SOLUTION: A substrate holder 13, in which boards 18 are contained, is moved vertically with a substrate transfer robot 14 for significantly reducing the number of times of position adjustments. Furthermore, since it is not necessary to use two rows of cassette banks, the dimensions of an apparatus can be reduced. |
