METHOD FOR PRODUCING SUBSTRATE WITH CONCAVE PARTS FOR MICROLENS, MICROLENS SUBSTRATE, COUNTER SUBSTRATE FOR LIQUID CRYSTAL PANEL, THE LIQUID CRYSTAL PANEL AND PROJECTION DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To produce a substrate having concave parts for microlenses by which the shape of microlenses can be made close to the designed shape and high light utilizing efficiency is attained. SOLUTION: A mask layer constituted of silicon is formed on the surface of a quartz glass substrate and openings are formed in the mask layer. The shape of the openings is similar in shape to the flat concave parts to be formed, and the center of each of the openings coincides with the center of each of the concave parts. The glass substrate is then wet-etched through the openings to form many concave parts with respect to the glass substrate, the mask layer is removed, and then the objective substrate with concave parts for microlenses is produced.