发明名称 |
Titanium nitride barrier layers |
摘要 |
Improved titanium nitride barrier layers are formed by depositing a first titanium layer; treating this layer with an oxygen plasma to form an oxygen-containing titanium layer thereover; depositing a titanium nitride layer over the oxygen-containing titanium layer; and treating the titanium nitride layer with an oxygen-containing plasma. Robust titanium nitride barrier layers are formed that can prevent spiking by an overlying aluminum contact layer even after heat treatment up to 550° C.
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申请公布号 |
US6238803(B1) |
申请公布日期 |
2001.05.29 |
申请号 |
US20000501566 |
申请日期 |
2000.02.09 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
FU JIANMING;XU ZHENG;CHEN FUSEN |
分类号 |
C23C14/06;H01L21/285;H01L21/768;(IPC1-7):C23C14/06 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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