| 摘要 |
PROBLEM TO BE SOLVED: To minimize contact traces in a probing operation as far as possible. SOLUTION: This contact probe device 1 is provided with a mounting part 2 which is attached to a probe guide mechanism. The contact probe device is provided with a probe body 7 which comes into contact with an object to be probed. The contact probe device is provided with a probe fixation part 6 to which the probe body 7 is fixed. The contact probe device is provided with a coupling means by which the mounting part 2 and the probe fixation part 6 are coupled so as to prevent the up-and-down movement of the probe fixation part 6 with reference to the mounting part 2. The coupling means is provided with a first elastic deformation part 3 in such a way that it comprises leaf springs 8, 8 which are installed side by side in the upper part and the lower part and which connect the mounting part 2 to their ends on one side and that it can be elastically deformed in the up-and-down direction. The coupling means is provided with a second elastic deformation part 5 in such a way it comprises leaf springs 8, 8 which are installed side by side in the upper part and the lower part and which connect the probe fixation part 6 to their end parts on one side and that it can be elastically deformed in the up-and-down direction. The coupling means is provided with a coupling part 4 which connects end parts, on the other side, of the respective leaf springs 8, 8 in the first and second elastic deformation parts 3, 5 in such a way that both elastic deformation parts 3, 5 can be arranged in parallel with each other on a plane at right angles to a guide direction.
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