| 摘要 |
A method and apparatus for monitoring and reporting electrical test results for semiconductor wafer based on a knowledge base generated from user defined tables. A computer program fetches the test data from a wafer electrical tester, reads a test parameter specification table and computes various statistics for each parameter. Rules defining device failure modes are parsed to assemble boolean logic text strings. The logic is evaluated to generate boolean results. A pass/fail determination is made and the results are sent to process engineers for corrective action.
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