| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink-jet recording head capable of reducing the residual stress generated between layers in a production step. SOLUTION: An ink-jet recording head comprising a nozzle plate having a nozzle for ejecting an ink, a pressure chamber substrate with a pressure chamber for ejecting the ink from the nozzle formed, a vibration plate formed on the pressure chamber substrate for pressuring the pressure chamber, a lower electrode laminated on the vibration plate, and a piezoelectric film provided in an area corresponding to the pressure chamber of the vibration plate between an upper electrode and the lower electrode, to be the pressure source for the vibration plate, wherein a conductive film (film containing either one of ReOx, and RuOx as the main component) made of a material different form that of the lower electrode, formed in the same pattern as that of the piezoelectric film is provided between the lower electrode and the piezoelectric film, is provided.
|
