| 摘要 |
A method of fabricating an SRAM cell having a first conductivity type substrate includes the steps of forming a well of a second conductivity type in the first conductivity type substrate, forming a first active region of a first access transistor and a second active region of a second access transistor in the well, the first and second active regions being in parallel with each other, forming a first trench in the first active region and a second trench in the second active region, wherein the first and second trenches extend into the substrate through the well, forming gate electrodes of the first and second access transistors on the active regions, forming gate electrodes of first and second drive transistors in the first and second trenches, respectively, implanting first conductivity type impurity ions into the active regions of the first and second access transistors, respectively, forming first and second load devices on the substrate, the first and second load devices electrically contacting first terminals of the first and second access transistors, and first and second bit lines electrically contacting second terminals of the first and second access transistors.
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